Download e-book for iPad: Acoustic Wave and Electromechanical Resonators: Concept to by Humberto Campanella

By Humberto Campanella

ISBN-10: 1607839776

ISBN-13: 9781607839774

ISBN-10: 1607839784

ISBN-13: 9781607839781

This groundbreaking ebook will give you a accomplished realizing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical process) resonators. For the 1st time anyplace, you discover huge insurance of those units at either the know-how and alertness degrees. This functional reference provides you with tips in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with general CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF platforms. additionally, this one-stop source appears on the major features, transformations, and boundaries of FBAR, MEMS, and NEMS units, aiding you to settle on the precise techniques to your initiatives. Over 280 illustrations and greater than a hundred thirty equations help key themes through the e-book.

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Extra resources for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)

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90–99. , “Engineering MEMS Resonators with Low Thermoelastic Damping,” J. Microelectromech. , Vol. 15, 2006, pp. 1437–1445. , “A Class of Micromachined Magnetic Resonator for High-Frequency Magnetic Sensor Applications,” J. Appl. , Vol. 99, 2006, 08B309. [34] Greywall, D. , “Sensitive Magnetometer Incorporating a High-Q Nonlinear Mechanical Resonator,” Meas. Sci. , Vol. 16, 2005, pp. 2473–2482. , Vol. 8, 2008, pp. 373–3738. [36] Vasquez, D. , and J. W. Judy, “Flexure-Based Nanomagnetic Actuators and Their Ultimate Scaling Limits,” Proc.

IEEE Intl. Conf. MEMS 2002, January 20–24, 2002, Las Vegas, NV, pp. 459–466. , “Direct Wiring of Carbon Nanotubes for Integration in Nanoelectromechanical Systems,” J. Vac. Sci. , Vol. B24, 2006, p. 3144. Husain, A. , “Nanowire-Based Very-High-Frequency Electromechanical Resonator,” Appl. Phys. , Vol. 83, 2003, pp. 1240–1242. 34 MEMS and NEMS Resonator Technologies [4] Ozin, G. , A. C. Arsenault, and L. : RSC Publishing, 2009. [5] Bachand, G. , and Carlo D. , Vol. 2, 2000, pp. 179–184. [6] McCord, M.

8 show a cantilever placed between the two electrodes, when it resonates at the fundamental and second flexural modes (upper and lower images, respectively). Considering the previous analysis, one can conclude that the magnitude of the collected current at the read-out electrode will be higher when the resonator and electrode gap is reduced, their faced surfaces increased, and the biasing voltage augmented. Such parameters need careful design to avoid sticking, collapsing, or saturation of the resonator.

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Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems) by Humberto Campanella


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